Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection

Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection

Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection
Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection

LIT-Former Linking In-Plane and Through-Plane Transformers for Simultaneous CT Image Denoising and Deblurring